Dry etching nameplate, generally refers to the high temperature gas corrosion attack, common high-temperature oxidation. In the high-temperature gas, a layer of metal oxide film surface occurs, the growth properties of the membrane and the rules resolutions metal corrosion resistance. Growth rule film can be divided into linear rules, rules and logarithmic parabola rule. The risk of oxidation of the linear rule, since the metal weight loss with time at a constant rise. Parabolic and logarithmic rule oxide film thickness increases with the speed drops, safer, such as aluminum oxide at room temperature for several comply with the rules, growing a few days after the film on the suspension, so it has excellent resistance to atmospheric oxidation. Etching shape can be divided into two portions corrosion and uniform corrosion.